Determination of Aberration Center of STEM Ronchigram for Fully Automated Aberration Correctors
نویسندگان
چکیده
منابع مشابه
Aberration measurement using the Ronchigram contrast transfer function.
The bright field contrast transfer function is one of the most useful concepts in conventional transmission electron microscopy. However, the electron Ronchigram contrast transfer function, as derived by Cowley, is inherently more complicated since it is not isoplanatic. Here, we derive a local contrast transfer function for small patches in a Ronchigram and demonstrate its utility for the dire...
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Iron-rhodium (FeRh) nanoislands of equiatomic composition have been analysed using scanning transmission electron microscopy (STEM) electron energy loss spectroscopy(EELS) and high angle annular dark field (HAADF) techniques. Previous magnetometry results have lead to a hypothesis that at room temperature the core of the islands are antiferromagnetic while the shell has a small ferromagnetic si...
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An approach to in-situ wavefront aberration measurement is explored. The test is applicable to sensing aberrations from the image plane of a microlithography projection system or a mask inspection tool. A set of example results is presented which indicate that the method performs well on lenses with a Strehl ratio above 0.97. The method uses patterns produced by an open phase figure to determin...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2013
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s143192761300353x